http://scholars.ntou.edu.tw/handle/123456789/2641| Title: | Effect of Bias Voltage on Mechanical Properties of HiPIMS/RFMS Cosputtered Zr-Si-N Films | Authors: | Yung-I Chen Zheng, Y. Z. Chang, L. C. Liu, Y. H. |
Issue Date: | Sep-2019 | Journal Volume: | 12 | Journal Issue: | 17 | Source: | Materials | URI: | http://scholars.ntou.edu.tw/handle/123456789/2641 | DOI: | 10.3390/ma12172658 |
| Appears in Collections: | 光電與材料科技學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.