http://scholars.ntou.edu.tw/handle/123456789/2641| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yung-I Chen | en_US |
| dc.contributor.author | Zheng, Y. Z. | en_US |
| dc.contributor.author | Chang, L. C. | en_US |
| dc.contributor.author | Liu, Y. H. | en_US |
| dc.date.accessioned | 2020-11-17T03:48:09Z | - |
| dc.date.available | 2020-11-17T03:48:09Z | - |
| dc.date.issued | 2019-09 | - |
| dc.identifier.uri | http://scholars.ntou.edu.tw/handle/123456789/2641 | - |
| dc.relation.ispartof | Materials | en_US |
| dc.title | Effect of Bias Voltage on Mechanical Properties of HiPIMS/RFMS Cosputtered Zr-Si-N Films | en_US |
| dc.type | journal article | en_US |
| dc.identifier.doi | 10.3390/ma12172658 | - |
| dc.identifier.doi | <Go to ISI>://WOS:000488880300011 | - |
| dc.identifier.url | <Go to ISI>://WOS:000488880300011 | |
| dc.relation.journalvolume | 12 | en_US |
| dc.relation.journalissue | 17 | en_US |
| item.cerifentitytype | Publications | - |
| item.openairetype | journal article | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| item.fulltext | no fulltext | - |
| item.grantfulltext | none | - |
| crisitem.author.dept | College of Electrical Engineering and Computer Science | - |
| crisitem.author.dept | Department of Optoelectronics and Materials Technology | - |
| crisitem.author.dept | National Taiwan Ocean University,NTOU | - |
| crisitem.author.orcid | 0000-0003-0689-5709 | - |
| crisitem.author.parentorg | National Taiwan Ocean University,NTOU | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| Appears in Collections: | 光電與材料科技學系 | |
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