http://scholars.ntou.edu.tw/handle/123456789/4576| Title: | A TEM investigation of retained defects in Si wafer by 1 MeV Si ions bombardment | Authors: | Hsu, J. Y. Rong-Tan Huang Hung, M. J. Yu, Y. C. |
Issue Date: | Jun-2010 | Journal Volume: | 268 | Journal Issue: | 11-12 | Source: | Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms | URI: | http://scholars.ntou.edu.tw/handle/123456789/4576 | ISSN: | 0168-583X | DOI: | 10.1016/j.nimb.2010.02.086 |
| Appears in Collections: | 光電與材料科技學系 |
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