http://scholars.ntou.edu.tw/handle/123456789/4579| Title: | Temperature effect study of silicon-on-insulator structures prepared by high dose implantation of nitrogen | Authors: | Rong-Tan Huang Hsu, J. Y. Huang, J. W. Yu, Y. C. |
Issue Date: | Dec-2011 | Journal Volume: | 269 | Journal Issue: | 24 | Source: | Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms | URI: | http://scholars.ntou.edu.tw/handle/123456789/4579 | ISSN: | 0168-583X | DOI: | 10.1016/j.nimb.2011.04.092 |
| Appears in Collections: | 光電與材料科技學系 |
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