http://scholars.ntou.edu.tw/handle/123456789/4579| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Rong-Tan Huang | en_US |
| dc.contributor.author | Hsu, J. Y. | en_US |
| dc.contributor.author | Huang, J. W. | en_US |
| dc.contributor.author | Yu, Y. C. | en_US |
| dc.date.accessioned | 2020-11-19T01:45:43Z | - |
| dc.date.available | 2020-11-19T01:45:43Z | - |
| dc.date.issued | 2011-12 | - |
| dc.identifier.issn | 0168-583X | - |
| dc.identifier.uri | http://scholars.ntou.edu.tw/handle/123456789/4579 | - |
| dc.relation.ispartof | Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms | en_US |
| dc.title | Temperature effect study of silicon-on-insulator structures prepared by high dose implantation of nitrogen | en_US |
| dc.type | journal article | en_US |
| dc.identifier.doi | 10.1016/j.nimb.2011.04.092 | - |
| dc.identifier.doi | <Go to ISI>://WOS:000298363500081 | - |
| dc.identifier.url | <Go to ISI>://WOS:000298363500081 | |
| dc.relation.journalvolume | 269 | en_US |
| dc.relation.journalissue | 24 | en_US |
| item.cerifentitytype | Publications | - |
| item.openairetype | journal article | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| item.fulltext | no fulltext | - |
| item.grantfulltext | none | - |
| crisitem.author.dept | College of Electrical Engineering and Computer Science | - |
| crisitem.author.dept | Department of Optoelectronics and Materials Technology | - |
| crisitem.author.dept | National Taiwan Ocean University,NTOU | - |
| crisitem.author.parentorg | National Taiwan Ocean University,NTOU | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| Appears in Collections: | 光電與材料科技學系 | |
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