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Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/23761
DC FieldValueLanguage
dc.contributor.author吳俊逸en_US
dc.contributor.author譚安宏en_US
dc.date.accessioned2023-03-31T06:37:44Z-
dc.date.available2023-03-31T06:37:44Z-
dc.date.issued2022-09-
dc.identifier.urihttp://scholars.ntou.edu.tw/handle/123456789/23761-
dc.description證書號數:M631781en_US
dc.description.abstract一種半導體半成品結構製造設備,其包括:光源,用於發射第一光束;槽體,其底部為係為透光材質,對應設置於光源,以使具有光束圖樣的第二光束穿透槽體的底部,以固化容置於槽體的二氧化矽組成物液體之部分;導引裝置,設置於槽體之上,透過槽體的開口接觸二氧化矽組成物液體,用於拉出具有對應於光束圖樣之至少一凹槽的半導體半成品結構。藉由該導引裝置往上抽離一層一層堆積形成的半導體半成品結構,以及後續將半導體半成品結構進行加熱,以還原成為矽晶棒或碳化矽晶棒的半導體半成品結構。en_US
dc.language.isozhen_US
dc.title半導體半成品結構製造設備en_US
dc.title.alternativeSemiconductor semi-finished product structure manufacturing deviceen_US
dc.typepatenten_US
item.openairecristypehttp://purl.org/coar/resource_type/c_15cd-
item.cerifentitytypePatents-
item.languageiso639-1zh-
item.fulltextno fulltext-
item.grantfulltextnone-
item.openairetypepatent-
crisitem.author.deptNational Taiwan Ocean University,NTOU-
crisitem.author.deptCollege of Life Sciences-
crisitem.author.deptDepartment of Food Science-
crisitem.author.parentorgNational Taiwan Ocean University,NTOU-
crisitem.author.parentorgCollege of Life Sciences-
Appears in Collections:食品科學系
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