Ammonia Gas Sensing Characteristics of a Sputtered InSnZnO 4 Thin Film Decorated With Evaporated Platinum Nanoparticles

Abstract

A novel ammonia (NH3) gas sensor, employing an indium tin zinc oxide (InSnZnO4) thin film incorporated with platinum nanoparticles (Pt NPs), has been success-fully fabricated and studied. Comprehensive morphological, elemental, and compositional analyses were performed to examine the structural design of the device. Experimentally, the developed Pt NP/InSnZnO4 sensor, when exposedto 1000 ppm NH3/air gas, shows remarkably impressive detecting performance, including a significantly high sensing response S-R of 5665 with a response (recovery) time of 76 s (9 s) at 250 degrees C. An extremely low detection limit (LDL)of 10 ppb NH3/air (S-R=2.73) can be detected at 250 degrees C. The investigated sensor also demonstrates promising selectivity, reproducibility, and long-term (91 days) durability toward NH3 gas.