Improvement on Reliability Properties of Metal-Ferroelectric (BiFeO3)-Insulator (HfO2)-Semiconductor Structures Fabricated by Oxygen-Incorporated Magnetron Sputtering

請用此 Handle URI 來引用此文件： http://scholars.ntou.edu.tw/handle/123456789/6151

標題:	Improvement on Reliability Properties of Metal-Ferroelectric (BiFeO3)-Insulator (HfO2)-Semiconductor Structures Fabricated by Oxygen-Incorporated Magnetron Sputtering
作者:	Juan, T. P. C. Lu, J. H. Ming-Wei Lu
公開日期:	2008
卷:	155
期:	12
來源出版物:	Journal of the Electrochemical Society
URI:	http://scholars.ntou.edu.tw/handle/123456789/6151
ISSN:	0013-4651
DOI:	10.1149/1.2994630 ://WOS:000260479700078
顯示於：	水產養殖學系

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