http://scholars.ntou.edu.tw/handle/123456789/7578| Title: | An integrated pyroelectric infrared sensor with a PZT thin film | Authors: | Chung-Cheng Chang Tang, C. S. |
Keywords: | Pyroelectric;Lead zirconate titanate (PZT);Infrared sensors;JFET;Thin films;Voltage sensitivity;Specific detectivity | Issue Date: | 15-Mar-1998 | Publisher: | ELSEVIER | Journal Volume: | 65 | Journal Issue: | 2-3 | Start page/Pages: | 171-174 | Source: | Sensors and Actuators a-Physical | Abstract: | In this paper integrated pyroelectric infrared sensors have been made by combining a (Pb(Zr52Ti48)O3, PZT) thin film with an Si JFET. The JFET is used to read out the pyroelectrically generated signal. The relevant sensor parameters, voltage sensitivity and specific detectivity, are measured within a modulation frequency range from 0.2 to 10 Hz. With a 500 μm thick silicon substrate, the voltage sensitivity is Rv = 191 V W−1 and the maximum specific detectivity is D*=2 × 107 cm Hz1/2 W−1 at a modulation frequency of 1 Hz. |
URI: | http://scholars.ntou.edu.tw/handle/123456789/7578 | ISSN: | 0924-4247 | DOI: | 10.1016/s0924-4247(97)01663-4 |
| Appears in Collections: | 電機工程學系 |
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