http://scholars.ntou.edu.tw/handle/123456789/8518
Title: | Wafer defect inspection by neural analysis of region features | Authors: | Chang, C. Y. Li, C. H. Chang, Y. C. Mu-Der Jeng |
Issue Date: | Dec-2011 | Journal Volume: | 22 | Journal Issue: | 6 | Source: | Journal of Intelligent Manufacturing | URI: | http://scholars.ntou.edu.tw/handle/123456789/8518 | ISSN: | 0956-5515 | DOI: | 10.1007/s10845-009-0369-4 |
Appears in Collections: | 電機工程學系 |
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