Application of the inclined exposure and molding process to fabricate a micro beam-splitter with nanometer roughness

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/3435

Title:	Application of the inclined exposure and molding process to fabricate a micro beam-splitter with nanometer roughness
Authors:	Chuang, Y. J. Shih-Hao Huang Chen, Y. C. Hung, K. Y.
Issue Date:	Mar-2013
Journal Volume:	19
Journal Issue:	3
Source:	Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
URI:	http://scholars.ntou.edu.tw/handle/123456789/3435
ISSN:	0946-7076
DOI:	10.1007/s00542-012-1715-6 ://WOS:000315294000023
Appears in Collections:	機械與機電工程學系

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